Nanostructures Energy transfer Laser pyrolysis Oxides Pulvérisation magnétron radiofréquence M-lines Magnetron sputtering Cerium Irradiation CoMoS Crystal structure Oxygen vacancies Down-conversion Waveguides Oxide interface Erbium Hillocks Matériaux hybrides Al2O3 Couches minces Silicium Cathodoluminescence Conductivity FTIR Electroluminescence Semiconductors Luminescence Microstructure physics Thin film Raman scattering Hafnium silicates Terbium Microstructure Nanoparticules High-k dielectrics RF magnetron sputtering Friction Epitaxy Thin films Si-rich silicon oxide Hafnium silicate Rare-earth Copper Feature erasure Lifetime Nanostructuring Radiofrequency magnetron sputtering Fluorescence IR spectroscopy Atom probe tomography Silicon photonics AFM SiC Citric acid Infrared absorption Electron paramagnetic resonance XRD Raman Nanoparticles Photovoltaic Reactive magnetron sputtering Computational electromagnetic methods Hybrid materials Multilayers PZT Waveguide Nanostructured materials Structural properties Rare-earth ions Photoluminescence Rare earths Silicon nitride Sputtering Silicon Couches minces semi-conductrices Microstructure physique Rare earth Nanostructure Silicon nanocrystals CO adsorption Quantum-well Guide d'onde Pulvérisation cathodique Oxide materials Optical properties Films Liposomes MoS2 Phase transition Terres rares HR STEM-HAADF GENOMIQUE ADE-FDTD Silicon nanoclusters Grazing incidence X-ray diffraction Doping Si nanocluster Neodymium Optical amplifiers Refractive index