Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers
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Physics [physics]Origin | Files produced by the author(s) |
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Origin | Files produced by the author(s) |
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https://iogs.hal.science/hal-04355822
Submitted on : Wednesday, December 20, 2023-1:41:12 PM
Last modification on : Tuesday, October 8, 2024-6:40:02 PM