Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers - Groupe XUV (Optique XUV et Surfaces Optiques)
Journal Articles Applied optics Year : 2024

Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers

Fichier principal
Vignette du fichier
Mahmoud_applied_optics_2023_vol63_p30.pdf (21.71 Mo) Télécharger le fichier
Origin Files produced by the author(s)

Dates and versions

hal-04355822 , version 1 (20-12-2023)

Identifiers

Cite

Amr Hisham K. Mahmoud, Sébastien de Rossi, Evgueni Meltchakov, Blandine Capitanio, Muriel Thomasset, et al.. Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers. Applied optics, 2024, 63 (1), pp.30. ⟨10.1364/AO.505546⟩. ⟨hal-04355822⟩
92 View
51 Download

Altmetric

Share

More