Optical, chemical, and depth characterization of Al/SiC periodic multilayers - Institut d'Optique Graduate School
Conference Papers Year : 2009

Optical, chemical, and depth characterization of Al/SiC periodic multilayers

No file

Dates and versions

hal-00661774 , version 1 (20-01-2012)

Identifiers

Cite

Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Evgueni Meltchakov, et al.. Optical, chemical, and depth characterization of Al/SiC periodic multilayers. EUV and X-Ray Optics: Synergy between Laboratory and Space, Apr 2009, Prague, Czech Republic. pp.73600, ⟨10.1117/12.820913⟩. ⟨hal-00661774⟩
325 View
0 Download

Altmetric

Share

More